Simulation of coupled sputter-diffusion effects

U von Toussaint, A Mutzke, K Sugiyama, T Schwarz-Selinger

2016 · Physica Scripta · vol. T167 · pp. 014023 · IOP Publishing · 10.1088/0031-8949/t167/1/014023

Abstract

No abstract was available from the DOI metadata.

@article{Toussaint_2016,
 title={Simulation of coupled sputter-diffusion effects},
 volume={T167},
 ISSN={1402-4896},
 url={http://dx.doi.org/10.1088/0031-8949/t167/1/014023},
 DOI={10.1088/0031-8949/t167/1/014023},
 journal={Physica Scripta},
 publisher={IOP Publishing},
 author={Toussaint, U von and Mutzke, A and Sugiyama, K and Schwarz-Selinger, T},
 year={2016},
 month=jan,
 pages={014023} }