Statistically sound evaluation of trace element depth profiles by ion beam analysis

K. Schmid, U. von Toussaint

2012 · Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms · vol. 281 · pp. 64-71 · Elsevier BV · 10.1016/j.nimb.2012.03.024

Abstract

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@article{Schmid_2012,
 title={Statistically sound evaluation of trace element depth profiles by ion beam analysis},
 volume={281},
 ISSN={0168-583X},
 url={http://dx.doi.org/10.1016/j.nimb.2012.03.024},
 DOI={10.1016/j.nimb.2012.03.024},
 journal={Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms},
 publisher={Elsevier BV},
 author={Schmid, K. and von Toussaint, U.},
 year={2012},
 month=jun,
 pages={64–71} }